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IFF
semiconductor
FGM - Microelectronic technology
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IFF
semiconductor
FGM - Microelectronic technology
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1
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International Electron Devices Meeting. 2005 : IEDM : short course feedback next generation semiconductor manufacturing : [Washington, DC December 4, 2005 /
2005
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2
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International Electron Devices Meeting. 2005 : IEDM : short course low power system in chip CMOS technology platforms : [Washington, DC December 4, 2005] /
2005
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3
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Advanced interconnects and contacts : symposium held April 5 - 7, 1999, San Francisco, California, USA [MRS spring meeting 1999] /
Edelstein, Daniel C.
1999
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4
Book
Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California USA /
Murarka, Shyam P.
1998
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Available as
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4
Material Type
Book
4
Type of Literature
Conference Publication
4
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IFF
Name
Edelstein, Daniel C.
1
Murarka, Shyam P.
1
Subject
semiconductor
integrated circuit
3
manufacture
2
metallic film
1
microelectronics
1
silicide
1
Classification
FGM - Microelectronic technology
TBF - Semiconductor devices
2
TBV - Electronic devices
2
FJK - Specific semiconductor materials
1
FJLB - Physics of semiconductor devices
1
TBJ - Integrated circuits
1
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