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thin film technology
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thin film technology
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1
Book
Ferroelectric thin films. 8 : Symposium [on Ferroelectric Thin Films] held November 29 - December 2, 1999, Boston, Massachusetts, USA [at the 1999 MRS fall meeting] /
Schwartz, Robert W.
2000
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...thin film
technology
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2
Book
Multicomponent oxide films for electronics : symposium held April 6-8, 1999, San Francisco, California, U.S.A. /
Hawley, Marilyn E.
1999
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...thin film
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3
Book
Ultrathin SiO2 and high-K materials for ULSI gate dielectrics : symposium held April 5 - 8, 1999, San Francisco, California, USA [at the 1999 MRS spring meeting] /
Huff, H. R.
1999
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...thin film
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4
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Modeling and simulation of thin film processing : Symposium on modeling and simulation of thin film processing: proceedings: papers : San-Francisco, CA, 17.04.95-20.04.95.
Srolovitz, D. J.
1995
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5
Book
Pulsed laser deposition of thin films /
Chrisey, Douglas B.
1994
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Available as
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5
Material Type
Book
5
Type of Literature
Conference Publication
4
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IFF
IBN-1-2
1
ZB
1
Name
Chrisey, Douglas B.
1
Hawley, Marilyn E.
1
Hubler, G. K.
1
Huff, H. R.
1
Schwartz, Robert W.
1
Srolovitz, D. J.
1
Subject
thin film technology
Monte Carlo method
1
ULSI (ultra large scale integration)
1
computer simulation
1
dielectric film
1
evolution
1
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ferroelectric material
1
grain boundary
1
grain growth
1
growth
1
ion implantation
1
laser processing
1
microelectronics
1
modeling
1
molecular dynamics
1
plasma etching
1
plasma processing
1
point defect
1
semiconducting film
1
simulation
1
sputtering
1
surface diffusion
1
texture
1
thin film
1
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Classification
FGK - Thin film technology, epitaxy
4
FGM - Microelectronic technology
2
FGJ - Laser and electron beam processing
1
FJBE - Ferroelectric materials
1
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