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Monte Carlo method
AND
growth
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ZB
Monte Carlo method
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growth
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1
Book
Evolution of epitaxial structure and morphology: symposium : Boston, MA, 27.11.95-01.12.95.
Zangwill, A.
1996
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2
Book
Modeling and simulation of thin film processing : Symposium on modeling and simulation of thin film processing: proceedings: papers : San-Francisco, CA, 17.04.95-20.04.95.
Srolovitz, D. J.
1995
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ZB
IFF
1
Name
Srolovitz, D. J.
1
Zangwill, A.
1
Subject
Monte Carlo method
evolution
2
growth
thin film
2
X-ray absorption
1
X-ray scattering
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computer simulation
1
electron diffraction
1
epitaxy
1
grain boundary
1
grain growth
1
heteroepitaxy
1
ion implantation
1
low temperature
1
modeling
1
molecular beam epitaxy
1
molecular dynamics
1
monitoring
1
morphology
1
plasma etching
1
plasma processing
1
point defect
1
quantum well
1
relaxation
1
scaling
1
semiconducting film
1
semiconductor surface
1
simulation
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sputtering
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strain
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Classification
FGK - Thin film technology, epitaxy
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