Skip to content
Toggle navigation
VuFind
0
Items in e-Shelf
(Full)
History
User Account
Logout
User Account
Help
English
Deutsch
Books & more
Articles & more
JuSER
All Fields
Title
Journal Title
Name
Institution
Subject
Classification
Shelf Classification
Table of Contents
DOI
ISBN/ISSN
Call number
Report Number
Barcode
Full Texts (available in selection)
Find
Advanced
Reset Filters
Print Edition
FGK - Thin film technology, epitaxy
Reset Filters
Show filters (2)
Print Edition
FGK - Thin film technology, epitaxy
Ask a Librarian
Books & more
: Hits
1 - 2
of
2
sort by
Relevance
Year (descending)
Year (ascending)
Call Number
Author
Title
Select all titles on this page
Email
Export
Print
Save
Add to e-Shelf
Select result number 1
1
Book
ULSI technology /
Chang, C. Y.
1996
Subject (ZB):
“
...
etching
...
”
Call number:
Loading...
Located:
Loading...
Loading...
Literature Request
Loan/Reservation
Favorites
Saved in:
QR Code
Select result number 2
2
Book
Modeling and simulation of thin film processing : Symposium on modeling and simulation of thin film processing: proceedings: papers : San-Francisco, CA, 17.04.95-20.04.95.
Srolovitz, D. J.
1995
Subject (ZB):
“
...plasma
etching
...
”
Call number:
Loading...
Located:
Loading...
Loading...
Literature Request
Loan/Reservation
Favorites
Saved in:
QR Code
Select all titles on this page
Email
Export
Print
Save
Add to e-Shelf
Back
Narrow Search Results
Available as
Print Edition
Material Type
Book
2
Type of Literature
Conference Publication
1
Year of Publication
From:
To:
Location
IFF
2
IBN-1-2
1
ZB
1
Name
Chang, C. Y.
1
Srolovitz, D. J.
1
Subject
Monte Carlo method
1
ULSI (ultra large scale integration)
1
chemical vapor deposition
1
computer simulation
1
epitaxy
1
etching
1
more ...
evolution
1
fabrication
1
grain boundary
1
grain growth
1
growth
1
ion implantation
1
lithography
1
metallization
1
modeling
1
molecular dynamics
1
plasma etching
1
plasma processing
1
point defect
1
reliability
1
semiconducting film
1
simulation
1
sputtering
1
surface diffusion
1
texture
1
thin film
1
thin film technology
1
see all ...
less ...
Classification
FGK - Thin film technology, epitaxy
FGM - Microelectronic technology
1
TBL - VLSI
1
×
Loading...
