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semiconductor processing
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semiconductor processing
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1
Book
Semiconductor microchips and fabrication : a practical guide to theory and manufacturing /
Lian, Yaguang
2023
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FGM
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Microelectronic
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2
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Silicon-on-insulator technology : materials to VLSI /
Colinge, Jean-Pierre
2004
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3
Book
Handbook of semiconductor silicon technology /
O'Mara, William C.
1990
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FGM
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Material Type
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3
Type of Literature
Handbook, Textbook
1
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Location
ZB
3
Name
Colinge, Jean-Pierre
1
Herring, Robert B.
1
Hunt, Lee P.
1
Lian, Yaguang
1
O'Mara, William C.
1
Subject
semiconductor processing
microelectronics
2
silicon
2
VLSI technology
1
electronic circuit
1
integrated circuit
1
more ...
microfabrication (for microelectronics only)
1
semiconductor
1
semiconductor device
1
technology
1
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Classification
FGM - Microelectronic technology
3
FJKB - Elemental semiconductors
1
FJLB - Physics of semiconductor devices
1
TBD - Microelectronics
1
Language
English
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