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Handbook, Textbook
microelectromechanical systems (MEMS)
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Handbook, Textbook
microelectromechanical systems (MEMS)
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From MEMS to Bio-MEMS and Bio-NEMS : manufacturing techniques and applications /
Madou, Marc J.
2012
“
...
FGT
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Microtechnology
...
”
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Madou, Marc J.
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microelectromechanical systems (MEMS)
nanoelectronics
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nanotechnology
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scaling theory
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FGN - Nanotechnology
1
FGT - Microtechnology
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