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Keudell, Achim von.
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Keudell, Achim von.
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1
Book
Wachstumsmechanismen bei der plasmagestuetzten Abscheidung von Kohlenwasserstoffschichten, eine in situ Ellipsometriestudie.
Keudell, Achim von.
1996
“
...
FGKJ
-
Plasma
processing
,
etching
...
”
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1
Name
Keudell, Achim von.
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ellipsometry
1
thin film technology
1
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FGK - Thin film technology, epitaxy
1
FGKJ - Plasma processing, etching
1
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