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Conference Publication
Engemann, Jürgen
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Conference Publication
Engemann, Jürgen
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Multicompound and multilayered thin films for advanced microtechnologies: techniques, fundamentals and devices : NATO advanced study institute on multicomponent and multilayered th...
Auciello, Orlando
1993
“
...
FGK
-
Dünnfilmtechnologie
,
Epitaxie
...
”
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Auciello, Orlando
1
Engemann, Jürgen
Subject
Josephson device
1
crystal structure
1
ferroelectric material
1
film
1
growth
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heterostructure
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ion beam
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ion source
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microtechnology
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molecular beam
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multilayer system
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plasma generation
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semiconductor
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sputtering
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superconductor
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superlattice
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thin film
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FGK - Thin film technology, epitaxy
1
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