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Conference Publication
FNK - Plastics - application, engineering aspects
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Conference Publication
FNK - Plastics - application, engineering aspects
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1
Book
Materials science of high temperature polymers for microelectronics : Symposium on materials science of high temperature polymers for microelectronics : MRS spring meeting 1991: sy...
Grubb, D. T.
1991
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FGME
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Microlithography
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Polymers for microelectronics: science and technology : International Symposium on Polymers for Microelectronics - science and technology: proceedings : PME : 1989: proceedings : T...
Tabata, Y.
1990
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FGME
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Microlithography
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Polymers in microlithography: materials and processes : Polymers in microlithography: materials and processes: symposium : National meeting of the American Chemical Society. 0197 :...
Reichmanis, E.
1989
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Microlithography
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Polymers for high technology: electronics and photonics : Polymers for high technology: symposium : Meeting of the American Chemical Society. 0192 : Anaheim, CA, 07.09.86-12.09.86.
Bowden, M. J.
1987
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Microlithography
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Name
Bowden, M. J.
1
Grubb, D. T.
1
Reichmanis, E.
1
Tabata, Y.
1
Subject
photoresist
3
microelectronics
2
polymer
2
electronic packaging
1
microlithography
1
optical microlithography
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photosensitivity
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physical radiation effect
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thin film
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FGME - Microlithography
4
FNK - Plastics - application, engineering aspects
FAF - Materials research - comprehensive works
1
FNL - Polymers, plastics - specific materials
1
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