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Conference Publication
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thin film technology
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thin film technology
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1
Book
Low and high dielectric constant materials. Thin film materials for advanced packaging technologies : materials science, processing and reliability issues : proceedings of the Four...
Singh, R.
1999
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2
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Multicomponent oxide films for electronics : symposium held April 6-8, 1999, San Francisco, California, U.S.A. /
Hawley, Marilyn E.
1999
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Ultrathin SiO2 and high-K materials for ULSI gate dielectrics : symposium held April 5 - 8, 1999, San Francisco, California, USA [at the 1999 MRS spring meeting] /
Huff, H. R.
1999
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Materials issues in vacuum microelectronics : symposium held April 13-16, 1998, San Francisco, California, USA : [MRS Symposium on Materials Issues inVacuum Microelectronics ] /
Zhu, Wei
1998
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Low and high dielectric constant materials : materials science, processing and reliability issues : proceedings of the Second International Symposium [on Low and High Dielectric Co...
Rathore, Hazara S.
1997
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Advances in rapid thermal and integrated processing : NATO advanced study institute on advances in rapid thermal and integrated processing: proceedings : Acquafredda-di-Maratea, 03...
Roozeboom, F.
1996
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Dünnschichttechnologien 1990 : Statusseminar Vol 2 : 27.06.90-29.06.90 : Berichte zu F und E Projekten aus dem Förderbereich Physikalische Technologien des Bundesministers für Fors...
Doehl-Oelze, R.
1990
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8
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Amorphous semiconductor technology : proceedings of the First International Conference on Amorphous Semiconductor Technology : Asheville, North Carolina, USA, August 24-25, 1989 /
Thompson, Malcolm J.
1989
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Available as
Print Edition
8
Material Type
Book
Type of Literature
Conference Publication
Year of Publication
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Location
ZB
5
IFF
2
IBN-1-2
1
IEK-5
1
PTJ
1
Name
Doehl-Oelze, R.
1
Hawley, Marilyn E.
1
Huff, H. R.
1
Rathore, Hazara S.
1
Roozeboom, F.
1
Singh, R.
1
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Thompson, Malcolm J.
1
Zhu, Wei
1
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Subject
thin film technology
microelectronics
4
dielectric constant
2
dielectric material
2
ULSI (ultra large scale integration)
1
VLSI technology
1
more ...
amorphous silicon
1
chemical vapor deposition
1
dielectric film
1
emissivity
1
epitaxy
1
ion beam technology
1
rapid thermal processing
1
semiconductor
1
solar cell
1
solid state device
1
wafer scale integration
1
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Classification
FGM - Microelectronic technology
8
FGK - Thin film technology, epitaxy
6
FJBC - Dielectric materials
2
FAQ - Materials research - institutions, research and development
1
FGG - Ion beam technology
1
FJEC - Amorphous semiconductors
1
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