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Conference Publication
Monte Carlo method
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computer simulation
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Conference Publication
Monte Carlo method
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computer simulation
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Book
Modeling and simulation of thin film processing : Symposium on modeling and simulation of thin film processing: proceedings: papers : San-Francisco, CA, 17.04.95-20.04.95.
Srolovitz, D. J.
1995
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Book
Strongly coupled plasma physics : [proceedings of the NATO Advanced Research Workshop on Strongly Coupled Plasma Physics held August 4-9, 1986 in Santa Cruz, Claifornia] /
Rogers, Forrest J.
1987
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Rogers, Forrest J.
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Srolovitz, D. J.
1
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Monte Carlo method
computer simulation
astrophysics
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atomic model
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equation of state
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evolution
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grain boundary
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grain growth
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growth
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ion implantation
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modeling
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molecular dynamics
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perturbation theory
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plasma diagnostics
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plasma etching
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plasma generation
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plasma physics
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plasma processing
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point defect
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semiconducting film
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simulation
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sputtering
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surface diffusion
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texture
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thin film
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thin film technology
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FGK - Thin film technology, epitaxy
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PGA - Plasma physics
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English
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