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German
FGGB - Ion implantation, ion beam synthesis
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German
FGGB - Ion implantation, ion beam synthesis
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1
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Quantitative Augerelektronenspektroskopie zur Tiefenprofilanalyse von Schichtsystemen am Beispiel von Silizium nach Nickelimplantation /
Schoenborn, A.
1991
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FFGC
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Electron
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Name
Schoenborn, A.
1
Subject
Auger electron spectroscopy
1
depth profiling
1
ion implantation
1
nickel
1
silicon
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Classification
FFGC - Electron spectroscopy
1
FGGB - Ion implantation, ion beam synthesis
FJKB - Elemental semiconductors
1
Language
German
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