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FGMH - Metallization, physics of microelectronics
Electronic Edition
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German
FGMH - Metallization, physics of microelectronics
Electronic Edition
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1
E-Book
Mechanische Spannungen und Elektromigration in passivierten Leiterbahnen [E-Book] /
Roths, Christoph
1998
Subject (ZB):
“
...
electromigration
...
”
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2
E-Book
In-situ TEM-Untersuchungen des durch thermische Spannungen und Elektromigration induzierten Materietransports in Al-Leiterbahnen [E-Book] /
Heinen, Dirk
1997
Subject (ZB):
“
...
electromigration
...
”
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Electronic Edition
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Book
2
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2
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ZB
2
Name
Heinen, Dirk
1
Roths, Christoph
1
Subject
electromigration
2
dislocation
1
mechanical stress
1
metallization
1
transmission electron microscopy
1
Classification
FGMH - Metallization, physics of microelectronics
FDCD - Dislocations
1
FMGH - Metallographic microscopy, metallographic stereology
1
Language
German
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