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Silicon-on-insulator technology : materials to VLSI /
Colinge, Jean-Pierre
2004
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Microelectronics processing: chemical engineering aspects /
Hess, D. W.
1989
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3
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VLSI electronics microstructure science. 7 /
Einspruch, Norman G.
1983
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Colinge, Jean-Pierre
1
Einspruch, Norman G.
1
Hess, D. W.
1
Subject
VLSI technology
chemical vapor deposition
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electronic packaging
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film deposition
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liquid phase epitaxy
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materials processing
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microelectronics
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microlithography
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photoresist
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plasma etching
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semiconductor processing
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silicon
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technology
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vapor phase epitaxy
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