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chemical vapor deposition
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epitaxy
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thin film technology
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1
E-Book
Supercritical Si(1-x)Ge(x)alloy layers for optoelectronic applications grown by athmospheric pressure chemical vapor deposition [E-Book] /
Grimm, Karsten
2001
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Advances in rapid thermal and integrated processing : NATO advanced study institute on advances in rapid thermal and integrated processing: proceedings : Acquafredda-di-Maratea, 03...
Roozeboom, F.
1996
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Science and technology of electroceramic thin films : proceedings of the NATO advanced research workshop on science and technology of electroceramic thin films, Villa del Mare, Ita...
Auciello, Orlando
1995
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Available as
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2
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1
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3
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Conference Publication
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ZB
3
Name
Auciello, Orlando
1
Grimm, Karsten
1
Roozeboom, F.
1
Waser, Rainer
1
Subject
chemical vapor deposition
epitaxy
thin film technology
breakdown
1
electroluminescence
1
emissivity
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ferroelectric material
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heterostructure
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hysteresis
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microstructure
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photoluminescence
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polarization
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rapid thermal processing
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semiconductor
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semiconductor heterostructure
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stoichiometry
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thin film physics
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wafer scale integration
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FGK - Thin film technology, epitaxy
2
FFPE - Thin film electronic properties, semiconductor interfaces
1
FFPG - Multilayer systems, quantum structures
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FGM - Microelectronic technology
1
Language
English
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