1
Catalytic chemical vapor deposition : technology and applications of Cat CVD /
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Atomic layer deposition of nanostructured materials /
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Subject (ZB): “...film deposition...”
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Microelectronics processing: chemical engineering aspects /
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Ion assisted surface treatments, techniques and processes : Proceedings of the conference : Coventry, 14.09.1982-16.09.1982.
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1982
Subject (ZB): “...film deposition...”
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