1
Modeling of film deposition for microelectronic applications.
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Subject (ZB): “...sputter deposition...”
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2
Wear and corrosion resistant coatings by CVD and PVD /
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Subject (ZB): “...sputter deposition...”
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3
Ion assisted surface treatments, techniques and processes : Proceedings of the conference : Coventry, 14.09.1982-16.09.1982.
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1982
Subject (ZB): “...sputter deposition...”
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