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growth
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1
Book
Modeling and simulation of thin film processing : Symposium on modeling and simulation of thin film processing: proceedings: papers : San-Francisco, CA, 17.04.95-20.04.95.
Srolovitz, D. J.
1995
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2
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Diamond, SiC and nitride wide bandgap semiconductors : symposium : MRS spring meeting 1994 : San-Francisco, CA, 04.04.94-08.04.94.
Carter, C. H.
1994
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Name
Carter, C. H.
1
Srolovitz, D. J.
1
Subject
computer simulation
grain boundary
2
growth
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Monte Carlo method
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calorimeter
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defect
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diamond
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doping profile
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electron emission
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electronic device
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electronic structure
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epitaxy
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evolution
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field effect transistor
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grain growth
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impurity
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ion implantation
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modeling
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molecular dynamics
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nitride
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optoelectronics
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plasma etching
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plasma processing
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point defect
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preparation
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secondary electron emission
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semiconducting film
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semiconductor
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simulation
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FGK - Thin film technology, epitaxy
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FJK - Specific semiconductor materials
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