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1
Book
Modeling and simulation of thin film processing : Symposium on modeling and simulation of thin film processing: proceedings: papers : San-Francisco, CA, 17.04.95-20.04.95.
Srolovitz, D. J.
1995
Subject (ZB):
“
...
ion
implantation
...
”
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2
Book
Properties and growth of diamond.
Davies, G.
1994
Subject (ZB):
“
...
ion
implantation
...
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3
Book
International symposium on process physics and modeling in semiconductor technology 0003: proceedings : Electrochemical Society spring meeting 1993 : Honolulu, HI, 19.05.93-21.05.9...
Srinivasan, G. R.
1993
Subject (ZB):
“
...
ion
implantation
...
”
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1
Name
Davies, G.
1
Srinivasan, G. R.
1
Srolovitz, D. J.
1
Subject
growth
ion implantation
3
diffusion
2
modeling
2
plasma processing
2
thin film
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Monte Carlo method
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computer simulation
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decay
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diamond
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dislocation
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electric conductivity
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evolution
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grain boundary
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grain growth
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laser
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luminescence
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molecular dynamics
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nitrogen
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plasma etching
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point defect
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radiation damage
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semiconducting film
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semiconductor
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simulation
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sputtering
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surface
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surface diffusion
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FGC - Crystal growth, crystal technology
1
FGK - Thin film technology, epitaxy
1
FJH - Semiconductor physics
1
FJK - Specific semiconductor materials
1
FNX - Carbon, carbon materials
1
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