1
Fundamentals of BioMEMS and medical microdevices /
Book
2
Smart structures and materials 1995: smart electronics : SPIE symposium on smart materials and structures 1995: proceedings : Conference on smart electronics : San-Diego, CA, 02.03.95-03.03.95.
Book
3
Microsystem technology /
Book
4
The Physics of micro/nano-fabrication /
Book
5
Micro materials : 3rd international conference and poster exhibition : proceedings : MicroMat 2000, April 17 - 19, 2000, Berlin, Germany /
Book
6
Excimer lasers and new trends in laser microtechnology : International symposium workshop on excimer lasers and new trends in laser microtechnology: papers : Bremen, 10.11.92-13.11.92.
Book
7
Mikro-Nano-Integration : Beiträge des 8. GMM-Workshops ; 15. - 17.09.2020, Online-Veranstaltung [Compact Disc] /
Compact Disc