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microtechnology
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1
Book
Fundamentals of BioMEMS and medical microdevices /
Salitermann, Steven S.
2006
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2
Book
Smart structures and materials 1995: smart electronics : SPIE symposium on smart materials and structures 1995: proceedings : Conference on smart electronics : San-Diego, CA, 02.03...
Varadan, Vijay. K.
1995
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3
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Microsystem technology /
Menz, Wolfgang.
2001
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4
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The Physics of micro/nano-fabrication /
Brodie, Ivor.
1992
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5
Book
Micro materials : 3rd international conference and poster exhibition : proceedings : MicroMat 2000, April 17 - 19, 2000, Berlin, Germany /
Michel, B.
2000
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6
Book
Excimer lasers and new trends in laser microtechnology : International symposium workshop on excimer lasers and new trends in laser microtechnology: papers : Bremen, 10.11.92-13.11...
Metev, S.
1993
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7
Compact Disc
Mikro-Nano-Integration : Beiträge des 8. GMM-Workshops ; 15. - 17.09.2020, Online-Veranstaltung [Compact Disc] /
2020
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Available as
Print Edition
7
Material Type
Book
6
CD, DVD, Video Tape
1
Type of Literature
Conference Publication
4
Year of Publication
From:
To:
Location
ZB
5
IBG-1
2
IBN-1-2
1
Name
Brodie, Ivor.
1
Menz, Wolfgang.
1
Metev, S.
1
Michel, B.
1
Mohr, Jürgen.
1
Muray, Julius J.
1
more ...
Paul, Oliver.
1
Salitermann, Steven S.
1
Varadan, Vijay. K.
1
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Subject
microelectronics
microtechnology
lithography
2
microfabrication (for microelectronics only)
2
nanotechnology
2
ablation
1
more ...
antenna
1
biotechnology
1
chemical etching
1
diamond
1
gas
1
ion beam processing
1
irradiation
1
laser
1
medical aspect
1
microelectromechanical systems (MEMS)
1
microprobe
1
microstructure
1
microwave equipment
1
packaging
1
pattern formation
1
polypropylene
1
processing
1
surface activity
1
synthesis
1
technology transfer
1
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Classification
FGM - Microelectronic technology
4
FGT - Microtechnology
3
TBD - Microelectronics
2
FGP - Nanoelectronics
1
HCE - Biomedical engineering - general aspects
1
PEJ - Laser physics, laser materials
1
more ...
TBW - Sensors, actuators
1
TCLB - Electric waves, microwaves, Radar
1
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Language
English
1
German
1
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