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1
Book
Materials science in microelectronics. 1. The relationships between thin film processing and structure /
Machlin, Eugene S.
1995
Subject (ZB):
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...
film
deposition
...
”
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2
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Microelectronics processing: chemical engineering aspects /
Hess, D. W.
1989
Subject (ZB):
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...
film
deposition
...
”
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2
IMD-3
1
Name
Hess, D. W.
1
Machlin, Eugene S.
1
Subject
film deposition
2
microelectronics
VLSI technology
1
chemical vapor deposition
1
electronic packaging
1
liquid phase epitaxy
1
more ...
materials processing
1
microlithography
1
photoresist
1
plasma etching
1
structure
1
thin film technology
1
vapor phase epitaxy
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Classification
FGM - Microelectronic technology
2
FGK - Thin film technology, epitaxy
1
Language
English
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