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microfabrication (for microelectronics only)
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sensor (technical and physical)
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microfabrication (for microelectronics only)
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1
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Microsystem technology in chemistry and life science /
Anderson, Rolfe C.
1998
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Microtechnology
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Book
Micro system technologies 1994 : International conference on micro electro, opto, mechanical systems and components 0004 : Micro system technologies: international conference 0004...
Reichl, H.
1994
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Anderson, Rolfe C.
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Becker, Holger
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Cheng, J.
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Effenhauser, C. S.
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Ehrfeld, W.
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Manz, Andreas
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Reichl, H.
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Van den Berg, A.
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microfabrication (for microelectronics only)
microtechnology
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sensor (technical and physical)
actuator
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genetic code
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interface
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microanalysis
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microstructure
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neuron
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sensor (biological)
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sensor (chemical)
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sequence analysis
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thin film technology
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FGT - Microtechnology
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FHCH - Microstructural analysis
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