Skip to content
Toggle navigation
VuFind
0
Items in e-Shelf
(Full)
History
User Account
Logout
User Account
Help
English
Deutsch
Books & more
Articles & more
JuSER
All Fields
Title
Journal Title
Name
Institution
Subject
Classification
Shelf Classification
Table of Contents
DOI
ISBN/ISSN
Call number
Report Number
Barcode
Full Texts (available in selection)
Find
Advanced
Reset Filters
plasma physics
FGKJ - Plasma processing, etching
Reset Filters
Show filters (2)
plasma physics
FGKJ - Plasma processing, etching
Ask a Librarian
Books & more
: Hits
1 - 4
of
4
sort by
Relevance
Year (descending)
Year (ascending)
Call Number
Author
Title
Select all titles on this page
Email
Export
Print
Save
Add to e-Shelf
Select result number 1
1
Book
Principles of plasma discharges and materials processing /
Lichtenberg, Allan J.
2005
“
...
FGKJ
-
Plasma
processing
,
etching
...
”
Call number:
Loading...
Located:
Loading...
Table of Contents
Literature Request
Loan/Reservation
Favorites
Saved in:
QR Code
Select result number 2
2
Book
Low temperature plasma physics : fundamental aspects and applications /
Hippler, Rainer
2001
“
...
FGKJ
-
Plasma
processing
,
etching
...
”
Call number:
Loading...
Located:
Loading...
Loading...
Literature Request
Loan/Reservation
Favorites
Saved in:
QR Code
Select result number 3
3
Book
Vakuumbeschichtung Vol 0001: Plasmaphysik, Plasmadiagnostik, Analytik.
Frey, H.
1995
“
...
FGKJ
-
Plasma
processing
,
etching
...
”
Call number:
Loading...
Located:
Loading...
Loading...
Literature Request
Loan/Reservation
Favorites
Saved in:
QR Code
Select result number 4
4
Book
Atomic layer processing : semiconductor dry etching technology /
Lill, Thorsten
“
...
FGKJ
-
Plasma
processing
,
etching
...
”
Call number:
Loading...
Located:
Loading...
Table of Contents
Literature Request
Loan/Reservation
Favorites
Saved in:
QR Code
Select all titles on this page
Email
Export
Print
Save
Add to e-Shelf
/* Narrow Search Options */ ?>
Back
Narrow Search Results
Available as
Print Edition
3
Material Type
Book
4
Year of Publication
From:
To:
Location
ZB
4
IEK-4
1
Name
Frey, H.
1
Hippler, Rainer
1
Lichtenberg, Allan J.
1
Lieberman, Michael E.
1
Lill, Thorsten
1
Subject
plasma physics
ion implantation
2
plasma diagnostics
2
plasma etching
2
thin film technology
2
Nanostructured material
1
more ...
chemical vapor deposition
1
discharge
1
etching
1
plasma deposition
1
plasma processing
1
plasma wall interaction
1
semiconductor
1
surface analysis
1
surface modification
1
vacuum deposition
1
see all ...
less ...
Classification
FGKJ - Plasma processing, etching
FGKC - Vacuum deposition, MBE
1
PGA - Plasma physics
1
Language
English
1
/* End Narrow Search Options */ ?>
×
Loading...