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1

Principles of plasma discharges and materials processing /

Book

Principles of plasma discharges and materials processing /

Lichtenberg, Allan J.
2005

“...FGKJ - Plasma processing, etching...”
Table of Contents

2

Low temperature plasma physics : fundamental aspects and applications /

Book

Low temperature plasma physics : fundamental aspects and applications /

Hippler, Rainer
2001

“...FGKJ - Plasma processing, etching...”

3

Vakuumbeschichtung Vol 0001: Plasmaphysik, Plasmadiagnostik, Analytik.

Book

Vakuumbeschichtung Vol 0001: Plasmaphysik, Plasmadiagnostik, Analytik.

Frey, H.
1995

“...FGKJ - Plasma processing, etching...”

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