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plasma physics
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plasma diagnostics
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Low temperature plasma physics : fundamental aspects and applications /
Hippler, Rainer
2001
“
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FGKJ
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Plasma
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etching
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2
Book
Vakuumbeschichtung Vol 0001: Plasmaphysik, Plasmadiagnostik, Analytik.
Frey, H.
1995
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FGKJ
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Plasma
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etching
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Frey, H.
1
Hippler, Rainer
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plasma diagnostics
plasma physics
ion implantation
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plasma deposition
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plasma etching
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plasma wall interaction
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surface analysis
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surface modification
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thin film technology
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FGKJ - Plasma processing, etching
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FGKC - Vacuum deposition, MBE
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