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surface analysis
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1
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Vakuumbeschichtung Vol 0001: Plasmaphysik, Plasmadiagnostik, Analytik.
Frey, H.
1995
“
...
FGKJ
-
Plasma
processing
,
etching
...
”
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1
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Frey, H.
1
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ion implantation
1
plasma diagnostics
1
plasma physics
surface analysis
thin film technology
1
vacuum deposition
1
Classification
FGKC - Vacuum deposition, MBE
1
FGKJ - Plasma processing, etching
1
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