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plasma physics
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thin film technology
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thin film technology
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1
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Principles of plasma discharges and materials processing /
Lichtenberg, Allan J.
2005
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FGKJ
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etching
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2
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Vakuumbeschichtung Vol 0001: Plasmaphysik, Plasmadiagnostik, Analytik.
Frey, H.
1995
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FGKJ
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Plasma
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etching
...
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2
IEK-4
1
Name
Frey, H.
1
Lichtenberg, Allan J.
1
Lieberman, Michael E.
1
Subject
ion implantation
2
plasma physics
thin film technology
chemical vapor deposition
1
discharge
1
plasma diagnostics
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plasma etching
1
surface analysis
1
vacuum deposition
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FGKJ - Plasma processing, etching
2
FGKC - Vacuum deposition, MBE
1
PGA - Plasma physics
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