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surface analysis
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microelectronics
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1
Book
Analysis of microelectronic materials and devices.
Grasserbauer, Manfred
1991
“
...
FHA
-
Materials
characterization
-
general
aspects
...
”
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IEK-14
1
ZB
1
Name
Grasserbauer, Manfred
1
Subject
materials characterization
1
microelectronics
surface analysis
Classification
FGML - Characterization of electronic materials
1
FHA - Materials characterization - general aspects
1
FHAB - Surface and thin film characterization
1
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