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FGM - Microelectronic technology
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1
Book
Untersuchungen der Elektronenemissionseigenschaften von mikrostrukturierten Metall Isolator Metall (MIM) Dünnschichtkathoden für die parallelprojizierende Elektronenstrahl Lithogra...
Benz, Reinhard.
1995
“
...
FFGH
-
Electron
emission
,
field
emission
...
”
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2
Book
Vacuum microelectronics. 1989 : International conference on vacuum microelectronics. 0002: proceedings : Bath, 24.07.89-26.07.89.
Turner, R. E.
1989
“
...
FFGH
-
Electron
emission
,
field
emission
...
”
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Name
Benz, Reinhard.
1
Turner, R. E.
1
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cathode
1
field emission
1
lithography
1
microelectronics
1
thin film technology
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Classification
FFGH - Electron emission, field emission
2
FGM - Microelectronic technology
TBF - Semiconductor devices
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