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Untersuchungen der Elektronenemissionseigenschaften von mikrostrukturierten Metall Isolator Metall (MIM) Dünnschichtkathoden für die parallelprojizierende Elektronenstrahl Lithogra...
Benz, Reinhard.
1995
“
...
FFGH
-
Electron
emission
,
field
emission
...
”
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Benz, Reinhard.
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cathode
lithography
1
thin film technology
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FFGH - Electron emission, field emission
1
FGM - Microelectronic technology
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