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FGM - Microelectronic technology
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FGM - Microelectronic technology
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1
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Modeling of film deposition for microelectronic applications.
Rossnagel, S.
1996
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FFP
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Physik
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2
Book
Tantalum thin films /
Westwood, William D.
1975
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Physik
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2
Name
Rossnagel, S.
1
Waterhouse, N.
1
Westwood, William D.
1
Wilcox, P. S.
1
Subject
chemical vapor deposition
1
mathematical method
1
simulation
1
sputter deposition
1
thin film physics
1
Classification
FGK - Thin film technology, epitaxy
2
FGM - Microelectronic technology
FANE - Computational solid state physics
1
FFPE - Thin film electronic properties, semiconductor interfaces
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