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1
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Modeling of film deposition for microelectronic applications.
Rossnagel, S.
1996
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FFP
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Physik
dünner
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2
Book
Physics of thin films. 5.
Hass, G.
1969
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Physik
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Name
Hass, G.
1
Rossnagel, S.
1
Subject
chemical vapor deposition
thin film physics
2
mathematical method
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photocathode
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semiconducting film
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simulation
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sputter deposition
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FANE - Computational solid state physics
1
FFP - Physics of thin films
1
FGK - Thin film technology, epitaxy
1
FGM - Microelectronic technology
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