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FGME - Microlithography
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FGME - Microlithography
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1
Book
Electron beam, x-ray, and ion beam techniques for submicrometer lithographies. 0005 : Santa-Clara, CA, 11.03.1986-12.03.1986 /
Blais, P. D.
1986
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FGJ
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2
Book
Electron beam interactions with solids for microscopy, microanalysis and microlithography : Pfefferkorn conference 0001 : Monterey, CA, 18.04.82-23.04.82 /c edited by D. F. Kyser
Kyser, D. F.
1984
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3
Book
Symposium on electron and ion beam science and technology: international conference. 9 : proceedings Saint-Louis, MO, 05.80.
Bakish, R.
1980
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4
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Symposium on electron and ion beam science and technology. 8 : proceedings Seattle, WA, 22.05.78.
Bakish, R.
1978
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5
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Symposium on electron and ion beam science and technology. 7 : proceedings Princeton, NJ, 04.05.76.
Bakish, R.
1976
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6
Book
International conference on electron and ion beam science and technology. 6 : San-Francisco, CA, 12.05.74-17.05.74.
Bakish, R.
1974
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7
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International conference on electron and ion beam science and technology. 4 : Houston, TX, 07.05.72-12.05.72.
Bakish, R.
1972
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8
Book
International conference on electron and ion beam science and technology. 1 : Toronto, 03.05.64-07.05.64.
Bakish, R.
1965
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Available as
Print Edition
8
Material Type
Book
8
Type of Literature
Conference Publication
8
Year of Publication
From:
To:
Location
ZB
8
Name
Bakish, R.
6
Blais, P. D.
1
Kyser, D. F.
1
Subject
X-ray lithography
1
electron beam welding
1
ion implantation
1
microelectronics
1
Classification
FGJ - Laser and electron beam processing
8
FGME - Microlithography
FGGE - Ion beam surface modification
7
FHJ - Scanning electron microscopy, analytical electron microscopy
1
Language
English
2
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