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ion implantation
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ion implantation
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1
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Rapid thermal and integrated processing : SPIE conference on rapid thermal and integrated processing: proceedings : San-Jose, CA, 10.09.91-11.09.91.
Moslehi, M. M.
1992
“
...
FGJ
-
Laser
and
electron
beam
processing
...
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Select result number 2
2
Book
Symposium on electron and ion beam science and technology. 8 : proceedings Seattle, WA, 22.05.78.
Bakish, R.
1978
“
...
FGJ
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Laser
and
electron
beam
processing
...
”
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Bakish, R.
1
Moslehi, M. M.
1
Subject
ion implantation
X-ray lithography
1
chemical vapor deposition
1
dielectric material
1
rapid thermal processing
1
temperature measurement
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Classification
FGJ - Laser and electron beam processing
2
FGGE - Ion beam surface modification
1
FGME - Microlithography
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