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1
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Materials science in microelectronics. 1. The relationships between thin film processing and structure /
Machlin, Eugene S.
1995
“
...
FGK
-
Dünnfilmtechnologie
,
Epitaxie
...
”
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Select result number 2
2
Book
Dry etching for microelectronics.
Powell, R. A.
1984
“
...
FGK
-
Dünnfilmtechnologie
,
Epitaxie
...
”
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IEK-5
ZB
2
Name
Machlin, Eugene S.
1
Powell, R. A.
1
Subject
etching
1
film deposition
1
microelectronics
1
structure
1
thin film technology
1
Classification
FGM - Microelectronic technology
2
FGK - Thin film technology, epitaxy
1
FGKJ - Plasma processing, etching
1
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