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evaporation
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evaporation
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1
Book
Physical vapor deposition of thin films /
Mahan, John E.
2000
“
...
FGK
-
Dünnfilmtechnologie
,
Epitaxie
...
”
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2
Book
Vakuumbeschichtung Vol 0002: Verfahren und Anlagen.
Kienel, G.
1995
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FGK
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Dünnfilmtechnologie
,
Epitaxie
...
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3
Book
Preparation of thin films.
George, J.
1992
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FGK
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Dünnfilmtechnologie
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Epitaxie
...
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4
Book
Vacuum technology, thin films, and sputtering : an introduction /
Stuart, R. V.
1983
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FGK
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Dünnfilmtechnologie
,
Epitaxie
...
”
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Available as
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4
Material Type
Book
4
Type of Literature
Handbook, Textbook
1
Year of Publication
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Location
ZB
4
Name
George, J.
1
Kienel, G.
1
Mahan, John E.
1
Stuart, R. V.
1
Subject
evaporation
sputtering
3
thin film technology
2
adsorption
1
condensation
1
epitaxy
1
more ...
etching
1
film deposition
1
ion beam
1
ion beam technology
1
ion plating
1
preparation
1
thin film
1
vacuum deposition
1
vacuum technique
1
vapor deposited coating
1
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Classification
FGK - Thin film technology, epitaxy
2
FGKC - Vacuum deposition, MBE
2
FGKF - Chemical vapor deposition
1
FGKJ - Plasma processing, etching
1
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