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1
E-Book
Plasma Surface Metallurgy [E-Book] : With Double Glow Discharge TechnologyXu-Tec Process /
Xu, Zhong
2017
“
...
FGKJ
-
Plasma
processing
,
etching
...
”
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2
Book
Glow discharge processes : sputtering and plasma etching /
Chapman, Brian N.
1980
“
...
FGKJ
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Plasma
processing
,
etching
...
”
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ZB
2
IEK-4
1
Name
Chapman, Brian N.
1
Xiong, Frank F.
1
Xu, Zhong
1
Subject
glow discharge
Coatings.
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Corrosion and anti-corrosives.
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Plasma (Ionized gases).
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Tribology.
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metal surface
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metallurgy
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plasma etching
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plasma processing
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sputtering
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FGKJ - Plasma processing, etching
2
FGKC - Vacuum deposition, MBE
1
PGCC - Electric discharges in gases
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