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1
Book
Handbook of thin film devices. 1. Hetero-structures for high performance devices /
Wood, Colin E. C.
2000
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FGM
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Microelectronic
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2
Book
Mikroelektronik. 2. Herstellungsprozesse für integrierte Schaltungen /
Hoppe, Bernhard.
1998
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FGM
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Microelectronic
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3
E-Book
Untersuchung der Facettenbildung bei selektiver Epitaxie von Si mittels LPCVD [E-Book] /
Grimm, Karsten
1997
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FGM
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Microelectronic
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...
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4
Book
Advances in rapid thermal and integrated processing : NATO advanced study institute on advances in rapid thermal and integrated processing: proceedings : Acquafredda-di-Maratea, 03...
Roozeboom, F.
1996
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Microelectronic
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5
Book
ULSI technology /
Chang, C. Y.
1996
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Microelectronic
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6
Book
Advanced semiconductor epitaxial growth processes and lateral and vertical fabrication : Somerset, NJ, 23.03.92-26.03.92.
Malik, R. J.
1992
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Available as
Print Edition
5
Electronic Edition
1
Material Type
Book
6
Type of Literature
Handbook, Textbook
2
Conference Publication
2
Report
1
Year of Publication
From:
To:
Location
ZB
4
IBN-1-2
2
IFF
1
Name
Chang, C. Y.
1
Grimm, Karsten
1
Hoppe, Bernhard.
1
Malik, R. J.
1
Roozeboom, F.
1
Wood, Colin E. C.
1
Subject
epitaxy
chemical vapor deposition
4
etching
2
semiconductor
2
thin film technology
2
ULSI (ultra large scale integration)
1
more ...
diffusion
1
emissivity
1
fabrication
1
field effect transistor
1
heterojunction
1
heterostructure
1
ion implantation
1
lithography
1
metallization
1
microfabrication (for microelectronics only)
1
microlithography
1
rapid thermal processing
1
reliability
1
semiconductor device
1
semiconductor processing
1
solid state device
1
transmission electron microscopy
1
wafer scale integration
1
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Classification
FGM - Microelectronic technology
6
FGK - Thin film technology, epitaxy
4
FJLB - Physics of semiconductor devices
1
TBL - VLSI
1
Language
German
1
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