JuLib | Books & more - {"FGM - Mikroelektronik - Technologie"}

Ask a Librarian

1

Introduction to microlithography.

Book

Introduction to microlithography.

Thompson, L. F.
1994

“...FGM - Mikroelektronik - Technologie...”

2

Materials for microlithography: radiation sensitive polymers : Based on a symposium : American Chemical Society meeting. 0187 : Saint-Louis, MO, 08.04.84-13.04.84.

Book

Materials for microlithography: radiation sensitive polymers : Based on a symposium : American Chemical Society meeting. 0187 : Saint-Louis, MO, 08.04.84-13.04.84.

Thompson, L. F.
1984

“...FGM - Mikroelektronik - Technologie...”

3

Introduction to microlithography : Theory, materials, and processing : American Chemical Society meeting. 0185 : Seattle, WA, 20.03.83-25.03.83.

Book

Introduction to microlithography : Theory, materials, and processing : American Chemical Society meeting. 0185 : Seattle, WA, 20.03.83-25.03.83.

Thompson, L. F.
1983

“...FGM - Mikroelektronik - Technologie...”

Select all titles on this page