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FNK - Plastics - application, engineering aspects
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FNK - Plastics - application, engineering aspects
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Polymers in microlithography: materials and processes : Polymers in microlithography: materials and processes: symposium : National meeting of the American Chemical Society. 0197 :...
Reichmanis, E.
1989
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FGM
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Mikroelektronik
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Technologie
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2
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Polymers in microelectronics: fundamentals and applications.
Soane, D. S.
1989
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FGM
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Mikroelektronik
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Technologie
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ZB
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Name
Martynenko, Z.
1
Reichmanis, E.
1
Soane, D. S.
1
Subject
photoresist
2
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FGME - Microlithography
2
FNK - Plastics - application, engineering aspects
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