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Principles of lithography /
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Handbook of microlithography, micromachining, and microfabrication. 2. Micromachining and microfabrication /
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Mikromechanik : Einführung in Technologie und Anwendungen.
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Microcircuit engineering. 1984 : Microcircuit engineering conference. 1984: proceedings : ME. 1984: proceedings : Berlin, 25.09.1984-29.09.1984.
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Microcircuit engineering. 1983 : Microcircuit engineering conference. 1983: proceedings : ME. 1983: proceedings : Cambridge, 25.09.1983-29.09.1983 /
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