1
Gate dielectrics and MOS ULSls : principles, technologies and applications /
Book
...FGMH - Metallization, physics of microelectronics...
2
MOS - Transistoren in selektiver Epitaxie.
Book
...FGMH - Metallization, physics of microelectronics...
3
Advanced interconnection and contact schemes based on TiSi2 and CoSi2: relevant materials issues and technological implementation.
Book
...FGMH - Metallization, physics of microelectronics...