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1
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Metal impurities in silicon-device fabrication /
Graff, Klaus.
2000
“
...
FJH
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Halbleiterphysik
...
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Select result number 2
2
Book
Clusters of interstitial atoms in silicon and germanium /
Aseev, Aleksandre Leonidovic
1994
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FJH
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Halbleiterphysik
...
”
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2
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ZB
2
Name
Aseev, Aleksandre Leonidovic
1
Bartsch, Heinz
1
Fedina, Ludmila A.
1
Graff, Klaus.
1
Hoehl, Detlef
1
Subject
crystal defect
2
semiconductor
2
silicon
defect generation
1
defect structure
1
electron irradiation
1
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elemental semiconductor
1
fabrication
1
germanium
1
impurity
1
physical radiation effect
1
point defect
1
semiconductor device
1
transition metal
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Classification
FJHE - Defects and radiation effects in semiconductors
2
FJKB - Elemental semiconductors
1
Language
English
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