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Select result number 21
21
Book
Impurity doping processes in silicon.
Wang, Franklin F. Y.
1981
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Select result number 22
22
Book
Fine line lithography.
Newman, R.
1980
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Available as
Print Edition
16
Electronic Edition
6
Material Type
Book
22
Type of Literature
Handbook, Textbook
1
Conference Publication
1
Year of Publication
From:
To:
Location
ZB
22
IEK-5
3
IEK-11
2
IEK-STE
2
Name
Emonts, Bernd
3
Stolten, Detlef
3
Bergholz, Timm
2
Carmo, Marcelo
2
Dischler, Bernhard
2
Fritz, David L.
2
more ...
Hake, Jürgen-Friedrich
2
Khattak, C. P.
2
Korte, Carsten
2
Linßen, Jochen
2
Luhr, Sebastian
2
Mandt, Tabea
2
Mergel, Jürgen
2
Peters, Ralf
2
Tietze, Vanessa
2
Tjarks, Geert
2
Wackerl, Jürgen
2
Wasserscheid, Peter
2
Arai, Yasuhiko
1
Bass, Michael
1
Bilotta, A. J.
1
Boothroyd, G. (Geoffrey)
1
Dewhurst, Peter
1
Goldade, V. A.
1
Isshiki, Minoru
1
Kestelman, V. N.
1
Knight, W. A.
1
Makarevich, A. V.
1
Malik, R. J.
1
Mazumder, J.
1
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Subject
Materials science.
4
laser processing
3
Chemical engineering.
2
Engineering.
2
Industrial engineering.
2
Physics.
2
more ...
hydrogen energy
2
Concurrent engineering.
1
Condensed matter.
1
Crystallography.
1
Fuel cells.
1
Industrial design.
1
Materials
1
Measurement.
1
Metals.
1
Physical chemistry.
1
Physical measurements.
1
Polymers.
1
Product design.
1
Production planning.
1
Thermodynamics.
1
Thin films.
1
X-ray lithography
1
chemical vapor deposition
1
cutting
1
diamond
1
electron beam lithography
1
energy carrier
1
etching
1
gas cleaning
1
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Classification
FGCD - Crystal growth of specific substances
4
FJKB - Elemental semiconductors
3
ESB - Hydrogen energy
2
FGJ - Laser and electron beam processing
2
FJEC - Amorphous semiconductors
2
FGA - Materials processing - general aspects
1
more ...
FGKJ - Plasma processing, etching
1
FGM - Microelectronic technology
1
FGME - Microlithography
1
FGMH - Metallization, physics of microelectronics
1
FJKC - III - V semiconductors
1
FNN - Ceramics - general aspects
1
FNNE - Ceramics - mechanical and thermal properties
1
FNX - Carbon, carbon materials
1
THI - Robotics
1
THJ - Machining
1
THJL - Laser tooling
1
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Language
English
8
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