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Materials science of microelectromechanical systems (MEMS) devices. IV : symposium held November 25-28, 2001 Boston, Massachusetts USA /
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Subject (ZB): “...materials science...”
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Materials issues in novel Si-based technology : symposium held Nevember 26-28, 2001 Boston, Massachusetts, US /
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Physics and electronics : visions of the future /
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Subject (ZB): “...materials science...”
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Molecular beam epitaxy : fundamentals and current status /
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“...Springer series in materials science ;...”
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Processing of semiconductors.
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“...Materials science and technology ;...”
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The silicon / SiO2 system.
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Balk, P.
1988
“...Materials science monographs ;...”
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