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1
Book
Glow discharge processes : sputtering and plasma etching /
Chapman, Brian N.
1980
“
...
PGCC
-
Electric
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in
gases
...
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2
Book
Electrical discharges.
Hirsh, M. N.
1978
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3
Book
Introduction to electrical discharges in gases.
Brown, S. C.
1966
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4
Book
Physical electronics vol 0001: fundamentals of electronic discharges in gases.
Morgan, C. G.
1965
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5
Book
Electrical breakdown of gases.
Meek, J. M.
1953
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PGCC
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Electric
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Available as
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5
Material Type
Book
5
Type of Literature
Handbook, Textbook
3
Year of Publication
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Location
IEK-4
ZB
4
Name
Beck, A. H.
1
Bogen, P.
1
Brown, S. C.
1
Chapman, Brian N.
1
Craggs, J. D.
1
Hirsh, M. N.
1
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Meek, J. M.
1
Morgan, C. G.
1
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Subject
glow discharge
2
electric arc
1
electric discharge
1
electrophoresis
1
gas discharge
1
high frequency discharge
1
more ...
plasma etching
1
plasma heating
1
sputtering
1
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Classification
PGCC - Electric discharges in gases
5
FGKC - Vacuum deposition, MBE
1
FGKJ - Plasma processing, etching
1
TBA - Electronic engineering - general
1
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