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1
E-Book
Untersuchung des negativen Glimmlichts von abnormalen Edelgas-Glimmentladungen mit und ohne Hochfrequenz-Zusatzheizung [E-Book] /
Holtkamp, Markus
1997
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PGCC
-
Electric
discharges
in
gases
...
”
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2
Book
Glow discharge processes : sputtering and plasma etching /
Chapman, Brian N.
1980
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PGCC
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Electric
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3
Book
Electrical discharges.
Hirsh, M. N.
1978
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PGCC
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Electric
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4
Book
Electrical discharges in gases.
Penning, F. M.
1965
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PGCC
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Electric
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gases
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Available as
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3
Electronic Edition
1
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Book
4
Type of Literature
Handbook, Textbook
1
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ZB
3
IEK-4
2
IEK-8
1
Name
Bogen, P.
1
Chapman, Brian N.
1
Hirsh, M. N.
1
Holtkamp, Markus
1
Penning, F. M.
1
Subject
glow discharge
electric arc
2
electric discharge
1
electron density
1
electron temperature
1
electrophoresis
1
more ...
high frequency discharge
1
plasma etching
1
plasma heating
1
sputtering
1
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Classification
PGCC - Electric discharges in gases
4
FGKC - Vacuum deposition, MBE
1
FGKJ - Plasma processing, etching
1
PGC - Physics of ionized gases, electric discharges
1
Language
German
1
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