Table of Contents: “...Introduction -- Strain technology of Si-based materials -- SiGe Epitaxial Growth and material characterization -- SiGe Source and Drain Integration and transistor performance investigation -- Pattern Dependency behavior of SiGe Selective Epitaxy...”

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Table of Contents: “...-assembling growth of silicon nanostructures with micro shadow masks -- Radiative recombination in SiGe/Si dots and wires selectively grown by LPCVD -- Evolution of Si surface nanostructure under growth conditions -- Nanostructures Prepared by Selective Epitaxy...”

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Table of Contents: “... Silicon Epitaxy for Novel Device Structures -- Low Temperature Epitaxy -- Auto doping, Transition Width and Dopant Incorporation/Reincorporation -- Buried Layer Pattern Transmittance -- Selective Epitaxial Growth -- Conclusion -- Participants....”

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