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Advances in electronics and electron physics. Microelectronics and microscopy /
Hawkes, Peter W.
1992
Subject (ZB):
“
...
electron
beam
lithography
...
”
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Hawkes, Peter W.
1
Subject
electron beam lithography
1
microelectronics
1
scanning electron microscopy
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FGME - Microlithography
1
FHJ - Scanning electron microscopy, analytical electron microscopy
1
TEA - Electrical engineering - general
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