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1
Book
Glow discharge processes : sputtering and plasma etching /
Chapman, Brian N.
1980
Subject (ZB):
“
...plasma
etching
...
”
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IEK-4
1
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Name
Chapman, Brian N.
Subject
glow discharge
1
plasma etching
1
sputtering
1
Classification
FGKC - Vacuum deposition, MBE
1
FGKJ - Plasma processing, etching
1
PGCC - Electric discharges in gases
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